The laboratory has been carrying out electrical measurements of semiconductor structures and integrated circuits - encapsulated and unencapsulated - for over a decade. The fundamental item of the equipment base is the Summit 12000B-AP semi-automatic probe station from Cascade Microtech (currently FormFactor). It enables measurements on semiconductor substrate plates with a diameter of up to 200 millimeters. The station can be controlled by a measuring instrument or computer, which allows you to program a series of measurements that will be repeated on each of the structures created on a single substrate plate. The station's electromagnetic shielding allows currents to be measured at the level of single femtoamperes. The temperature control system allows measurements to be carried out in the temperature range from -55C to +200C. By using dedicated measurement cards, it is possible to test integrated circuits on a substrate board. The station is currently equipped with 6 DC manipulators for current-voltage measurements and 2 RF manipulators. DC measurements are currently performed using an Agilent B1500A semiconductor device characterizer (now Keysight), while RF measurements are performed using a ZVL6 vector circuit analyzer (VNA) from Rohde & Schwarz.
Location: Institute of Microelectronics and Optoelectronics, VLSI Engineering and Design Automation Division, Building of Electronics, GE, room no. 356A
Supervisor: Dominik Kasprowicz, PhD